Zirconia-based planar NO2 sensor using ultrathin NiO or laminated NiO–Au sensing electrode |
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Authors: | Vladimir V Plashnitsa Taro Ueda Perumal Elumalai Toshikazu Kawaguchi Norio Miura |
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Institution: | (1) Art, Science and Technology Center for Cooperative Research, Kyushu University, Kasuga-shi Fukuoka, 816-8580, Japan;(2) Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga-shi Fukuoka, 816-8580, Japan |
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Abstract: | The nanostructured thin NiO films with the thicknesses of 30–180 nm were examined as a sensing electrode (SE) for the planar
mixed-potential-type yttria-stabilized zirconia (YSZ)-based NO2 sensor. The sensing characteristics were examined in the temperature range of 600–800 °C under the wet condition (5 vol.%
water vapor). Among the NiO-SEs tested, the 60 nm-thick NiO-SE sintered at 1,000 °C was found to give the highest NO2 sensitivity in the NO2 concentration range of 50–400 ppm accompanying with fast response/recovery at the operating temperatures of 600–700 °C. The
high NO2 sensitivity was attributed to the high catalytic activity for both electrochemical reactions of O2 and NO2 at the interface of NiO-SE/YSZ. The ultrathin gold layer with the thickness of about 60 nm was additionally formed on the
60 nm-thick NiO-SE to fabricate the laminated-type (60 nm NiO/60 nm Au)-SE. It was demonstrated that the use of this laminated
(NiO–Au)-SE improved both the sensitivity and the selectivity to NO2. |
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Keywords: | NOx sensor Mixed potential Stabilized zirconia NiO Au Thin film |
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