Affiliation: | 1. Institut d’Electronique Fondamentale, UMR CNRS 8622, Université Paris-Sud, Orsay, France;2. Physic Institute, Charles University, Praha, Czech Republic;3. Interuniversitair Micro-Elektronica Centrum IMEC vzw, Leuven, Belgium;4. Institut de Metallurgy, Ostrava University, Czech Republic |