| 氮气/氨气的高压快脉冲放电光谱研究 |
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| 引用本文： | 刘征平,王培南,杨炜东,郑家骠,李富铭.氮气/氨气的高压快脉冲放电光谱研究[J].光谱学与光谱分析,2001,21(5):637-640. |
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| 作者姓名： | 刘征平 王培南 杨炜东 郑家骠 李富铭 |
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| 作者单位： | 复旦大学物理系 |
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| 基金项目： | 国家自然科学基金资助项目 (批准号 699780 0 5)，上海应用物理中心资助项目 (批准号98JO1 4 0 1 1 ) |
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| 摘 要： | 本文测量了氮气、氨气及其混合气体的快脉冲放电等离子体的光谱，用光谱分析方法研究了等离子体成分及其与气压和配比的关系，并讨论了在制备氮化物时使用氮、氨混合气体的有利之处。
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| 关 键 词： | 快脉冲放电 光谱 氮气 氨气 等离子体 氮化物 制备 合成 混合气体 |
| 文章编号： | 1000-0593(2001)05-0637-04 |
| 修稿时间： | 2000年4月3日 |
Spectroscopic Study on the High Voltage Fast Pulsed Discharge of Nitrogen, Ammonia or Their Mixture |
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| Z P Liu,P N Wang,W D Yang,J B Zheng,F M Li.Spectroscopic Study on the High Voltage Fast Pulsed Discharge of Nitrogen, Ammonia or Their Mixture[J].Spectroscopy and Spectral Analysis,2001,21(5):637-640. |
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| Authors: | Z P Liu P N Wang W D Yang J B Zheng F M Li |
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| Institution: | State Key Joint Lab for Materials Modification by Triple Beams, Department of Physics, Fudan University, Shanghai 200433, China. |
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| Abstract: | The emission spectra from the pulsed discharge plasma of nitrogen,ammonia or their mixture were measured.In the discharge of pure nitrogen gas,as the pressure increased,the discharge volume decreased and more dissociation of nitrogen molecules occurred due to the higher energy density.In the discharge of ammonia,N,N + and NH + were observed,but no NH 2 and NH 3 were detected,indicating that ammonia,which has the lower dissociation and ionization energies as compared to nitrogen,was highly dissociated.The discharge of the mixture of N 2 and NH 3 was also studied.The dependence of the dissociation of nitrogen on the ratio of nitrogen to ammonia was investigated by emission spectra.The optimal ratio for nitrogen dissociation was obtained.The advantage of using the mixture of nitrogen and ammonia in the synthesis of nitrides was discussed. |
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| Keywords: | Fast pulsed discharge Spectra Nitrogen/Ammonia |
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