Field emission characteristics of nano-sheet carbon films deposited by quartz-tube microwave plasma chemical vapour deposition |
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Authors: | Gu Guang-Rui Jin Zhe and Ito Toshimichi |
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Institution: | Department of Physics, College of Science,
Yanbian
University, Yanji 133002, China; Division of Electrical, Electronic and Information
Engineering, Graduate School of Engineering,
Osaka University,
Osaka
565-0871, Japan |
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Abstract: | Nano-sheet carbon films are prepared on Si wafers by means of
quartz-tube microwave plasma chemical vapour deposition (MPCVD) in a
gas mixture of hydrogen and methane. The structure of the fabricated
films is investigated by using field emission scanning electron
microscope (FESEM) and Raman spectroscopy. These nano-carbon films
are possessed of good field emission (FE) characteristics with a low
threshold field of 2.6\,V/$\mu $m and a high current density of
12.6\,mA/cm$^{2}$ at an electric field of 9\,V/$\mu $m. As the FE
currents tend to be saturated in a high $E$ region, no simple
Fowler--Nordheim (F--N) model is applicable. A modified F--N model
considering statistic effects of FE tip structures and a
space-charge-limited-current (SCLC) effect is applied successfully
to explaining the FE data observed at low and high electric fields,
respectively. |
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Keywords: | field emission carbon films nano-sheet microwave plasma chemical vapour deposition |
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