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Fabrication and design of various dimensions of multi-step ashperical microlens arrays for OLED package
Authors:C.T. Pan  Y.C. Chen  M.F. Chen  Y.C. Hsu
Affiliation:
  • Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, Kaohsiung 804, Taiwan
  • Center for Nanoscience & Nanotechnology, National Science Council Core Facilities Laboratory for Nano-Science and Nano-Technology in Kaohsiung-Pingtung area, National Sun Yat-Sen University, Kaohsiung 804, Taiwan
  • Abstract:
    An optical film with aspherical microlens array (A-MLA) by using multi-step lithography process for an OLED (Organic Light-Emitting Diode) package is fabricated, by which method the luminance of OLEDs can be enhanced. The method of design and fabrication of an A-MLA is explored in this study. In the design process, various parameters of an A-MLA such as curved profiles, layout template and dimensions of microlens are analyzed and characterized. Curved profiles include hyperbola, parabola, ellipse and sphere; and layout templates include square, hexagon, triangle and tangential circle. The profile of the A-MLA was determined by using a commercial optical simulation software, FRED. Based on the simulated result, a film with an A-MLA was fabricated using the LIGA-like (Lithographie Galvanoformung Abformung, LIGA) process, including lithography, sputtering, micro-molding with PDMS (Polydimethylsiloxane) and UV (Ultraviolet)-cured technology. The major challenge to this process is to use JSR-126N negative thick photoresist to manufacture an approximate A-MLA optical film with multi-step lithography method. Finally, the films with A-MLAs are attached to an OLED to measure their optical-electric properties. The effectsof A-MLA optical films on OLED luminance are analyzed. In addition, the measured results are compared with simulated ones. They show good agreement with each other.
    Keywords:Multi-step lithography   Aspherical   Microlens array   Parabola   OLED   Hexagon
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