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Investigation of quasi lateral-field-excitation on (yxl)-17° LiNbO3 single crystal |
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| Authors: | Tingfeng Ma Ji Wang Jianke Du Lili Yuan Zhenghua Qian Zhitian Zhang Chao Zhang |
| Affiliation: | 1. Piezoelectric Device Laboratory, School of Mechanical Engineering & Mechanics, Ningbo University, Ningbo 315211, China;2. State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;3. Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China |
| Abstract: | Quasi lateral-field-excitation (LFE) on LiNbO3 crystal is investigated both theoretically and experimentally. It is found that when the driving electric field direction is parallel to the crystallographic X-axis of the piezoelectric substrate, (yxl)-17° LiNbO3 LFE bulk acoustic wave devices work on quasi-LFE mode. The experimental results agreed with the theoretical prediction well. The results provide the cut of LiNbO3 crystal for quasi-LFE bulk acoustic wave devices, which is important for designing high performance LFE sensors on LiNbO3 substrates. |
| Keywords: | Piezoelectricity Plate LiNbO3 crystal Quasi lateral-field-excitation Resonator |
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