Plasma-assisted deposition of a three-layer structure by vacuum andgas arcs

The durability and adhesion of thin coatings often depends on the structure and properties of the layer intermediate between the coating and the substrate, especially in the case where the layer and the substrate are highly different in microhardness. With a vacuum arc and a hot-cathode arc, a process has been arranged which involves cleaning of the surface, nitration of the article, and deposition of a coating. As a result, a three-layer composition has been produced which consists of a TiN layer of thickness up to 5 μm and microhardness 20 GPa, an intermediate Fe₄N layer of thickness up to 8 μm and microhardness 7.5 GPa, and a nitrated layer of thickness up to 100 μm with a gradually varying microhardness. With the TiN layer showing high adhesion, the coating has a durability three of four times greater than that of a coating produced with the use of a conventional technology