纳米晶钛膜中氦注入的保持剂量

在从室温到500℃的温度范围内，用卢瑟福质子背散射技术分别测量了不同能量、不同剂量注入的纳米晶钛膜中氦的浓度分布，不同温度时的保持剂量及其释放浓度.发现氦在这种纳米晶粒膜中其氦-钛原子浓度比达到41%—52%时能在室温到100℃的温度下长期稳定保持，若其原子浓度达52%—74%时也能在室温环境有效保持.文中对这种具有大的界面体积比的膜能有效保持氦这种惰性元素的可能机理从能量观点进行了初步探讨. 关键词： 离子注入 纳米晶粒钛膜 氦 保持剂量

Preservation dose of helium-implanted in nanocrystal titanium films

Helium concentration profile, preservation dose and release rate from a nanocrystal titanium film implanted with helium at different energy and dose have been measured by proton Rutherford backscattering technique in a range from room temperature to 500℃. It is observed that the implanted helium may be stably preserved for a long time in the nanocrystal titanium film in the temperature environment from room temperature to below 100℃ when its concentration in up to 41%—52% of He-Ti atomic ratio, and also may be effectively preserved for a long time at room temperature if their atomic concentration ratio is up to 52%—74%. Possible mechanism of helium effectively preserved in the nanocrystal film with a large boundary volume ratio is preliminarily discussed from the energy viewpoint in this paper.