细电子束Cockcroft–Walton加速器的研究

细电子束由加速器通过电子枪发射电子,经电子透镜及偏转射向目标靶.以SDS-3电子束曝光机为基础,完成了电子束Cockcroft-Walton加速器噪声抑制的最优状态实验.系统为加速器调整电路提供一个正比于输入电压的电流.补偿放大器是由一个主放大器和一个辅助放大器组成,辅助放大器消除了主放大器自身的失调漂移.文中介绍了复合调整式Cockcroft-Walton加速器的总体设计方案,给出了实现加速器高稳定度的关键技术措施.从加速器总输出中滤去噪声信号,获得稳定的输出电压,并使电子束曝光机刻蚀出的图形质量和线条分辨率都得到了提高

Studies on Cockcroft-Walton Accelerator for Narrow E-Beam Lithography

For the use of narrow E-beam lithography, the Cockcroft-Walton accelerator is often required. Electrons from the gun will be accelerated by a high voltage and reached a target via electric focusing lenses and bends. To have a high quality narrow E-beam, the noise suppression for the accelerating voltage is one of the key issues. It is verified by our experiments on SDS-3 e-beam lithography machine. The system supplies analog current to the accelerator's tuning circuit, which is proportional to the input voltage. The compensation amplifier consists of main amplifier and an auxiliary one. The auxiliary amplifier reduces input offset drift on output of the main one. The general design project of a combined regulation type for the Cockcroft-Walton accelerator was described. The key technical measures for obtaining a high accelerating stability were introduced. By filtering the noise from the final output of the machine, an output voltage with high stability was obtained, and hence the pattern quality and the line resolution of the mask were improved.