| Au/SiO2纳米多层薄膜的制备及其性质表征 |
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| 引用本文： | 张 芸,张波萍,焦力实,张海龙,李向阳.Au/SiO2纳米多层薄膜的制备及其性质表征[J].物理学报,2006,55(7):3730-3735. |
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| 作者姓名： | 张 芸 张波萍 焦力实 张海龙 李向阳 |
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| 作者单位： | (1)北京科技大学材料科学与工程学院，北京 100083; (2)北京科技大学材料科学与工程学院，北京 100083;大连理工大学环境与生命学院，大连 116024; (3)钢铁研究总院功能材料研究所，北京 100081 |
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| 基金项目： | 国家自然科学基金(批准号:50572008), 教育部新世纪优秀人才支持计划(批准号:NCET-04-0105)和辽宁省科学技术基金(批准号:20042157)资助的课题. |
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| 摘 要： | 利用多靶磁控溅射技术制备了Au/SiO2纳米颗粒分散氧化物多层复合薄膜.研究了在保持Au单层颗粒膜沉积时间一定时薄膜厚度一定、变化SiO2的沉积时间及SiO2的沉积时间一定而改变薄膜厚度时，多层薄膜在薄膜厚度方向的微观结构对吸收光谱的影响.研究结果表明：具有纳米层状结构的Au/SiO2多层薄膜在560 nm波长附近有明显的表面等离子共振吸收峰，吸收峰的强度随Au颗粒的浓度增加而增强，在Au颗粒浓度相同的情况下，复合薄膜
关键词：
2纳米复合薄膜')" href="#">Au/SiO2纳米复合薄膜
多靶磁控溅射
吸收光谱
有效介质理论
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| 关 键 词： | Au/SiO2纳米复合薄膜 多靶磁控溅射 吸收光谱 有效介质理论 |
| 文章编号： | 1000-3290/2006/55（07）/3730-06 |
| 收稿时间： | 12 16 2005 12:00AM |
| 修稿时间： | 2005-12-162006-01-16 |
Preparation and characterization of Au/SiO2 nano-composite multilayer films |
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| Zhang Yun,Zhang Bo-Ping,Jiao Li-Shi,Zhang Hai-Long and Li Xiang-Yang.Preparation and characterization of Au/SiO2 nano-composite multilayer films[J].Acta Physica Sinica,2006,55(7):3730-3735. |
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| Authors: | Zhang Yun Zhang Bo-Ping Jiao Li-Shi Zhang Hai-Long and Li Xiang-Yang |
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| Institution: | 1School of Materials Science and Engineering, Beijing University of Science and Technology, Beijing 100083, China ; 2 ( School of Environmental and Biological Science and Technology, Dalian University of Technology, Dalian 116024, China ; 3 Institute of Fuactional Materials Research, Central Iron and Steel Research Institute, Beijing 100081, China |
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| Abstract: | Au/SiO2 nano-composite multilayer thin films were prepared by magnetron plasma sputtering. The effect of microstructure on the absorption spectra of films of the same thickness but under different deposition conditions, and films deposited under the same conditions but having different thicknesses was investigated. The results show that the optical absorption peaks appeared at 560 nm for the Au/SiO2 nano-composite multilayer films, the intensity of the absorption peak increased with increasing Au content and thickness of films. No nano-multilayer structure and absorption peak was observed when Au particle connected together due to high Au content. The optical absorption spectra of Au/SiO2 multilayer thin films well agree with the theoretical optical absorption spectra calculated from modified Maxwell-Garnett effective medium theory. |
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| Keywords: | Au/SiO2 nano-composite film magnetron plasma sputtering optical absorption spectra effective medium theory |
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