激光诱导应力波测量薄膜界面强度研究进展

薄膜界面强度是影响多层薄膜装置性能的重要参数。激光诱导应力波技术是在可控制和非接触条件下定量测量薄膜界面强度最有效的技术之一。在采用高强度应力波短脉冲加载实现界面层裂的同时，通过光学测量薄膜自由面瞬态位移，并利用应力波理论计算得到临界界面强度。通过精确控制试样几何形状及尺寸，包括拉伸、剪切和复合型在内的各种界面加载模式都可以实现。本文对激光诱导应力波测量薄膜界面强度研究进展进行了综述，并特别强调了不同加载模式的实现方法，高强度超薄薄膜的界面测量技术，以及如何通过辨别薄膜自由面瞬态位移光学干涉信号中的某些特殊性征来实时判断和测量界面的层裂。

Recent Developments in Thin Film Adhesion Measurement by Laser-induced Stress Waves

Thin film adhesion is an important parameter that can affect the performance and function of multilayer thin film devices. Laser-induced stresswave technique is one of the most versatile techniques that can quantitatively measure the thin film adhesion in a controlled and non-contact manner. While the interracial delamination is achieved through high-amplitude short-duration stress wave pulses, the critical interracial stress is calculated using wave mechanics from the optically measured transient displacement of the film free surface. By precisely controlling the sample geometry, different loading modes including tensile, mixedmode and pure-shear can be achieved at the film interface. This paper provides an overview of the recent developments in the thin film adhesion measurement using laser-induced stress wave technique. The special emphasis is on the realization of different mode-mixities, the adhesion measurement of superthin films of strong interfaces, and the in-situ real-time determination of the interracial failure using the special signatures in the optical interferometric fringe signals.