(1) Electrical Computer and Systems Engineering Department, Rensselaer Polytechnic Institute, 110 8th Street, JEC 6031, 12180 Troy, NY, USA
Abstract:
Polytype instability of SiC epitaxial films was the main focus of attention in the experiment performed since this factor has a decisive influence on graphene growth, which was the second stage of the experiment. Layers deposited in various initial C/Si ratios were analyzed.