| 形位误差光电检测系统研究 |
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| 引用本文： | 谢劲松,李成志,赵铁钧.形位误差光电检测系统研究[J].光学技术,2001,27(1):29-33. |
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| 作者姓名： | 谢劲松 李成志 赵铁钧 |
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| 作者单位： | 长春光学精密机械学院, |
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| 摘 要： | 简述了形位误差光电检测系统的结构和工作原理 ,为保证扫描速度均匀 ,利用激光特性而设计特殊的光学系统。为满足检测系统需要而设计了精密机械系统 ,伺服控制系统 ,电子学和计算机数字计算与数据处理系统 ,实现了高速、高效、高精度、非接触的自动检测。
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| 关 键 词： | 光电检测 激光扫描 形位误差 |
| 文章编号： | 1002-1582(2001)01-0029-05 |
| 修稿时间： | 2000年5月23日 |
Research on photoelectric inspecting system of formal and positional errors |
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| XIE Jin-song,LI Cheng-zhi,ZHAO Tie-jin.Research on photoelectric inspecting system of formal and positional errors[J].Optical Technique,2001,27(1):29-33. |
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| Authors: | XIE Jin-song LI Cheng-zhi ZHAO Tie-jin |
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| Abstract: | The structure and working principle of a photoelectric inspecting system are discussed In order to assure the well proportioned scan rate,the especial optical system that utilizes the laser property was designed To satisfy the need of inspecting system, fine mechanical system, servocontrol system digital calculate and data processing system of election and caculator were designed It implemented high speed, high efficient, high accuracy, non contact auto inspecting measurement and takes effect on promoting the development of advanced manufacture technology |
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| Keywords: | formal and positional error photoelectric inspecting laser scansio |
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