Investigation of magnetic properties for oblique deposited granular films by magnetic field annealing

A series of (Fe₅₇Co₂₄Ni₄Nb₂B₁₃)_x-(SiO₂)_1−x nano-granular thin films were fabricated by magnetron sputtering with different oblique incidence angle θ and excellent soft magnetic properties are achieved. Based on the results of magnetic field anneal at different temperature T_a, it is evidenced that orientation of atomic pairs contributes to the annealing treatment, and could manipulate magnetic anisotropy. The damping coefficient α decreases with increasing angle θ and this is ascribed to the anisotropy dissipation.