Stoney equation limits for samples deformed as a cylindrical surface |
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| Authors: | JM Pureza F Neri |
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| Institution: | a Department of Mechanical Engineering, Santa Catarina State University, UDESC, Joinville, Brazil
b Department of Physics, Santa Catarina State University, UDESC, Joinville, Brazil |
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| Abstract: | This paper proposes a three-dimensional system for modelling stress in thin films deposited on thick substrates deformed as a small cylindrical surface by means of the minimization of the deformation energy. The results show the validity limits of the well-established Stoney equation and indicate the necessity of a correction term for substrates with Poisson ratio (νs) in the range of 0.25 < νs ≤ 0.4. |
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| Keywords: | 62 20 Dc 81 40 Jj 68 60 Bs |
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