Sensitivity of Homogeneity Mapping of Dielectric Wafer Using Millimeter Waves |
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Authors: | Kancleris A Laurinaviius and T Anbinderis |
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Institution: | (1) Semiconductor Physics Institute, A. Gotauto 11, 01108, Vilnius, Lithuania. E-mail;(2) Joint Stock Company Elmika, Naugarduko 41, 03227 Vilnius, Lithuania. E-mail |
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Abstract: | A plane electromagnetic wave normally falling on a surface of a dielectric plate has been considered to investigate the sensitivity of the dielectric constant homogeneity mapping in the dielectric wafer by measuring the phase and/or the amplitude of the millimeter wave reflected from or transmitted through it. Measurement conditions at which the highest sensitivity might be achieved are established. The sensitivity at Fabry-Perot resonance conditions as well as at frequency shifted from resonance has been considered. |
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Keywords: | millimeter waves material homogeneity mapping measurement sensitivity |
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