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Application of secondary ion mass spectrometry for analyzing the composition and structure of surface layers of fine materials
Authors:V P Ivanov
Institution:(1) Institute of Technical Sciences SASA, Knez Mihajlova 35/IV, 11000 Belgrade, Serbia;(2) Solid State Section, Physics Department, Aristotle University of Thessaloniki, 54124 Thessaloniki, Greece;(3) Institute for Multidisciplinary Research, Kneza Viseslava 1, 11000 Belgrade, Serbia;(4) Faculty of Electrical Engineering, University of Belgrade, Bulevar kralja Aleksandra 73, 11000 Belgrade, Serbia
Abstract:Fundamental and methodological aspects of secondary ion mass spectrometry applied to analysis of elemental/phase composition and structure of the surface layers of fine materials are discussed.
Keywords:
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