| Ti1—xAlxN涂层的组织结构及Al元素的作用机理 |
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| 引用本文： | 王永康,熊仁章,雷廷权,夏立芳,李炳生.Ti1—xAlxN涂层的组织结构及Al元素的作用机理[J].宁波大学学报(理工版),2001,14(4):48-51. |
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| 作者姓名： | 王永康 熊仁章 雷廷权 夏立芳 李炳生 |
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| 作者单位： | 1. 宁波市表面工程研究中心,
2. 哈尔滨工业大学, |
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| 摘 要： | 通过不同Al含量的Ti-Al粉末冶金靶，采用多孤离子镀技术制备了Ti1-xAlxN涂层。用SEM、XRD、GAXRD以及XTEM等手段研究了涂层的组织结构及Al元素的作用。研究表明，TiAlN涂层呈柱状多晶组织，（Ti,Al)N为涂层的主要组成相；随着Al含量的增加，涂层中的（Ti,Al)N相将减少，且其晶格常数将降低。
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| 关 键 词： | 多弧离子镀 Ti1－xAlxN涂层 组织结构 铝元素 晶格常数 金属材料 表面处理 氮化铝钛 多元涂层 |
| 文章编号： | 1001-5132(2001)04-0048-04 |
| 修稿时间： | 2001年10月12 |
The Effect of Al Element on the Microstructure of Ti1-xAlxN Coating |
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| WANG Yong-kang ,XIONG Ren-zhang ,LEI Ting-quan ,XIA Li-fang ,LI Bing-sheng.The Effect of Al Element on the Microstructure of Ti1-xAlxN Coating[J].Journal of Ningbo University(Natural Science and Engineering Edition),2001,14(4):48-51. |
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| Authors: | WANG Yong-kang XIONG Ren-zhang LEI Ting-quan XIA Li-fang LI Bing-sheng |
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| Institution: | WANG Yong-kang 1,XIONG Ren-zhang 1,LEI Ting-quan 2,XIA Li-fang 2,LI Bing-sheng 1 |
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| Abstract: | Ti 1-x Al xN coating are deposited by multiarcion plating method with cast Ti-Al alloy and hot-press-sintered Ti-Al alloy used as the targets. The microstructure of the coating and the mechanism were studied by SEM?XRD and XTEM. The results show that the TiAlN coating has a polycrystalline columnar structure, it is mainly composed of (Ti,Al)N; The raise of Al element would decrease the formation and the lattice constant of (Ti,Al)N. |
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| Keywords: | multi-arc ion plating Ti 1-x Al xN coating microstructure (Ti Al)N |
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