| 优化沉积参数对微晶硅薄膜太阳电池性能的影响 |
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| 引用本文： | 张晓丹,赵颖,高艳涛,朱锋,魏长春,孙建,耿新华,熊绍珍. 优化沉积参数对微晶硅薄膜太阳电池性能的影响[J]. 人工晶体学报, 2006, 35(1): 170-172,169 |
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| 作者姓名： | 张晓丹 赵颖 高艳涛 朱锋 魏长春 孙建 耿新华 熊绍珍 |
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| 作者单位： | 南开大学光电子薄膜器件与技术研究所,天津,300071;南开大学光电子薄膜器件与技术天津市重点实验室,天津,300071;光电信息技术科学教育部重点实验室(南开大学,天津大学)天津,300071 |
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| 基金项目： | 国家“973”重大基础研究发展规划项目(G2000028202G2000028203)，天津市科技攻关项目(No.043186511)，国家自然科学基金项目(No.60506003) |
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| 摘 要： | 本文主要采用甚高频等离子体增强化学气相沉积技术制备了不同硅烷浓度、辉光功率和反应气体流量的单结微晶硅薄膜太阳电池。电池的I-V测试结果表明:电池的开路电压随功率的降低、硅烷浓度和气体流量的增加而增加,而对应的短路电流密度在一定的硅烷浓度条件下达到最大,填充因子也在逐渐的增加。文中对具体内容进行了详细的分析。
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| 关 键 词： | 微晶硅薄膜太阳电池 气体流量 硅烷浓度 |
| 文章编号： | 1000-985X（2006）01-0170-03 |
| 收稿时间： | 2005-07-02 |
| 修稿时间： | 2005-07-02 |
Effect of Optimization of Deposition Parameters on the Performance of Microcrystalline Silicon Solar Cells |
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| ZHANG Xiao-dan,ZHAO Ying,GAO Yan-tao,ZHU Feng,WEI Chang-chun,SUN Jian,GENG Xin-hua,XIONG Shao-zhen. Effect of Optimization of Deposition Parameters on the Performance of Microcrystalline Silicon Solar Cells[J]. Journal of Synthetic Crystals, 2006, 35(1): 170-172,169 |
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| Authors: | ZHANG Xiao-dan ZHAO Ying GAO Yan-tao ZHU Feng WEI Chang-chun SUN Jian GENG Xin-hua XIONG Shao-zhen |
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| Affiliation: | Institute of Photo-electronics Thin Film Devices and Technique of Nankni University, Tianjin 300071, China; Key Laboratory of Photo-electronics Thin Fill Devices and Technique of Tianjin, Tianjin 300071, China; Key Laboratory of Opto-electronic Information Science and Technology ( Nankai University,Tianjin University |
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| Abstract: | Series of microcrystalline silicon solar cells were fabricated by very high frequency plasma enhanced chemical vapor deposition at different silane concentrations,discharge powers and total flow rate.The results of I-V measurements of solar cells indicate that the open circuit voltage(V_(oc)) and the fill factor(FF) increase with the decrease of discharge power,and with the increase of silane concentration and total flow rate.However,the short circuit current density(J_(sc)) reached a maximum at a certain silane concentration.The details can be seen in the paper. |
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| Keywords: | microcrystalline silicon solar cells total flow rate silane concentration |
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