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光束整形系统异形元件的研制
引用本文:付秀华,崔金迪,贾宗合.光束整形系统异形元件的研制[J].中国光学,2014,7(3):469-475.
作者姓名:付秀华  崔金迪  贾宗合
作者单位:长春理工大学 光电工程学院, 吉林 长春 130022
基金项目:广东省教育部产学研结合资助项目(No.2010B090400048)
摘    要:为了实现非球柱面镜的高精度加工,解决这一领域面临的难题,对非球柱面镜的加工和检测方法进行了深入的研究。采用古典与现代制造技术相结合的方法,研制了用于光束整形的异形元件,该异形元件是由非球柱面镜和柱面镜组成。针对非球柱面镜面型难以控制的问题,给出了独特的抛光模设计。结果表明:经过轮廓仪检测面型精度为0.848 7 μm,达到了图纸精度,满足了光学元件的使用要求。

关 键 词:非球柱面镜  加工  检测  面形误差
收稿时间:2013/10/11

Fabrication of odd-form component using in beam shaping system
FU Xiu-hua,CUI Jin-di,JIA Zong-he.Fabrication of odd-form component using in beam shaping system[J].Chinese Optics,2014,7(3):469-475.
Authors:FU Xiu-hua  CUI Jin-di  JIA Zong-he
Institution:School of Mechanical Engineering, Heilongjiang University of Science and Technology, Harbin 150022, China
Abstract:In order to realize the aspheric cylindrical mirror of high precision processing,and solve the difficult problems in this field,the aspheric cylindrical mirror processing and testing methods are deeply researched. Classical and modern processing methods are adopted and odd-form component for beam shaping system are fabricated in this paper,which is composed of aspheric cylindrical mirror and cylindrical mirror. A unique production of polishing disk is proposed aiming at the problem that the surface shape is controlled hardly. Results show that the surface error is 0. 848 7μm by the profilometer detecting,which can meet the operational requirement of the optical elements.
Keywords:aspheric cylindrical  processing  testing  surface error
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