| A top-face-sway electromagnetic micromotor |
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| 作者姓名： | 梁静秋 乐孜纯 姚劲松 吴志勇 贾宏光 吴一辉 贾智 吕琼莹 宣明 王立军 |
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| 作者单位： | State Key Laboratory of Applied Optics，Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences，Changchun 130022，Information Engineering College，Zhejiang University of Technology，Hangzhou 310014，State Key Laboratory of Applied Optics，Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences，Changchun 130022，State Key Laboratory of Applied Optics，Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences，Changchun 130022，State Key Laboratory of Applied Optics，Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences，Changchun 130022，State Key Laboratory of Applied Optics，Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences，Changchun 130022，State Key Laboratory of Applied Optics，Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences，Changchun 130022，State Key Laboratory of Applied Optics，Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences，Changchun 130022，State Key Laboratory of Applied Optics，Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences，Changchun 130022，State Key Laboratory of Applied Optics，Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences，Changchun 130022 |
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| 基金项目： | This work was supported by the Chinese Committee of Science and Technology, Pandeng Project B (94-0307) and Development Project of Science and Technology, Jilin Province, China (No. 19990509). J. Liang's e-mail address is wwbljq@public.cc.jl.cn. |
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| 摘 要： | In this paper, the structure of a top-face-sway electromagnetic micromotor and its principle, fabrication and performance are introduced. A combination of the electromagnetic actuating and the planetary reducing provides this micromotor an advantage of low rotational speed and high torque. In addition, since a flexible coupling absorbs the sway and only outputs rotation, it gives this micromotor a balanced output. The dimension of the micromotor is 5 mm. Its rotation speed has a range of 20 - 860 rpm, and its driving current is 300 mA. The output torque of the micromotor is measured to be 13.0 uNm.
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