Selective metallization of photostructurable glass by femtosecond laser direct writing for biochip application

We report the selective metallization of photostructurable glass by femtosecond (fs) laser direct writing followed by electroless copper (Cu) plating. It was found that a Cu thin film can be deposited only on the rough surface of glass ablated by the fs laser. The deposited Cu thin film exhibits strong adhesion and excellent electrical properties. A Cu film can even be deposited on the internal wall of a hollow microchannel inside photostructurable glass by the multiphoton absorption of the fs laser. To show the use of this technique for micro-total-analysis-system (μ-TAS) applications, the fabrication of a microheater operating at temperatures up to 200 °C was demonstrated. PACS 81.05.Kf; 85.40.Ls; 87.85.Va