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The secondary X-ray fluorescence and absorption near the interface of multi-material: Case of EDS microanalysis
Affiliation:1. Department of Terrestrial Magnetism, Carnegie Institution for Science, 5241 Broad Branch Road, NW, Washington, DC 20015, USA;2. HL Dodge Department of Physics & Astronomy, University of Oklahoma, Norman, OK 73019, USA;3. Department of Physics & Astronomy, Amherst College, AC# 2244, Amherst, MA 01002, USA;1. Instituto de Ciencia de Materiales de Sevilla (CSIC), 41092 Sevilla, Spain;2. Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute, Forschungszentrum Jülich, D-52425 Jülich, Germany;3. Center for Electron Nanoscopy, Technical University of Denmark, DK-2800 Kongens Lyngby, Denmark;4. University of Oxford, Department of Materials, Parks Road, Oxford OX1 3PH, UK;5. NARILIS – NAmur Research Institute for LIfe Sciences, Research Center in Physics of Matter and Radiation (PMR), Laboratoire d’Analyses par Réactions Nucléaires (LARN), FUNDP University of Namur, Belgium;1. Institute of Inorganic Chemistry, Slovak Academy of Science, Dúbravská cesta 9, 845 36 Bratislava, Slovakia;2. Institute of Materials Research, Slovak Academy of Sciences, Watsonova 47, 043 53 Košice, Slovakia;3. Alexander Dubček University of Trenčín, and RONA, j.s.c, Študentská 2, 911 50 Trenčín, Slovakia;1. Department of Physics, Hangzhou Normal University, Hangzhou 310036, China;2. Department of Physics and Astronomy, University of Missouri, Columbia, MO 65211, USA;1. Department of Physics, Faculty of Science, Karadeniz Technical University, 61080 Trabzon, Turkey;2. Department of Chemistry, Faculty of Science, Karadeniz Technical University, 61080 Trabzon, Turkey
Abstract:A simple model is proposed to take into account secondary X-ray fluorescence and absorption effects near the interface. This model is based on the investigation of the shape change of the first derivative equation that can fit the sigmoidal EDS profile obtained when a high vacuum electron beam passes through the interface of two adjacent materials. The contribution of the photoelectric absorption of primary X-rays (characteristic and Bremsstrahlung) and the secondary fluorescence on the degradation of the X-ray spatial resolution can be easily quantified. The close agreement between the simulated (Monte Carlo simulation using the Casino software) and the experimental data serves to assess the reliability of this developed model.
Keywords:Secondary X-ray fluorescence  X-ray absorption  Lateral resolution  EDS microanalysis  EDS profile  Interface
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