Influence of ignition condition on the growth of silicon thin films using plasma enhanced chemical vapour deposition |
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Authors: | Zhang Hai-Long Liu Feng-Zhen Zhu Mei-Fang Liu Jin-Long |
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Affiliation: | Graduate University of Chinese Academy of Sciences, Beijing 100049, China |
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Abstract: | The influences of the plasma ignition condition in plasma enhanced chemical vapour deposition (PECVD) on the interfaces and the microstructures of hydrogenated microcrystalline Si (μc-Si:H) thin films are investigated. The plasma ignition condition is modified by varying the ratio of SiH4 to H2 (RH). For plasma ignited with a constant gas ratio, the time-resolved optical emission spectroscopy presents a low value of the emission intensity ratio of Hα to SiH* (IHα/ISiH*) at the initial stage, which leads to a thick amorphous incubation layer. For the ignition condition with a profiling RH, the higher IHα/ISiH* values are realized. By optimizing the RH modulation, a uniform crystallinity along the growth direction and a denser μ c-Si:H film can be obtained. However, an excessively high IHα/ISiH* may damage the interface properties, which is indicated by capacitance-voltage (C-V) measurements. Well controlling the ignition condition is critically important for the applications of Si thin films. |
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Keywords: | plasma enhanced chemical vapour deposition microcrystalline silicon ignition condition |
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