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Mechanisms of Stress Generation in Thin Films and Coatings |
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| Authors: | Shugurov A. R. Panin A. V. |
| Affiliation: | 1.Institute of Strength Physics and Materials Science, Siberian Branch, Russian Academy of Sciences, 634055, Tomsk, Russia ; |
| Abstract: | Technical Physics - Analysis of the literature data on the reasons for the development of mechanical stresses in epitaxial, polycrystalline, and amorphous films during their formation and under... |
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