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A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition |
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| Authors: | Shibalov M. V. Porokhov N. V. Mumlyakov A. M. Trofimov I. V. Dyud’bin G. D. Timofeeva E. R. Tagachenkov A. M. Anufriev Yu. V. Zenova E. V. Tarkhov M. A. |
| Affiliation: | 1.Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, 119991, Moscow, Russia ; |
| Abstract: | Technical Physics - A method is presented for the deposition of ultrathin superconducting NbNx films by atomic layer deposition enhanced by plasma from an organometallic precursor and an H2/Ar gas... |
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