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Low energy sputtering of neutral Cu2 molecules
Authors:C Burleigh Cooper  James R Woodyard
Institution:Physics Department, University of Delaware, Newark, DE 19711, USA;Wayne State University, Detroit, MI 48202, USA
Abstract:The ratios of relative yields of neutral sputtered Cu2 molecules to neutral sputtered Cu atoms were found to be linearly proportional to the sputtering yield of Cu, from a Cu target under bombardment by Ar+ ions (energy 50–90 eV), as determined by secondary neutral mass spectrometry.
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