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Effect of Kr ion irradiation on the Fe/SiO2 interface
Authors:G. Principi  P. Polato  A. Paccagnella  A. Maddalena  S. Lo Russo  G. Battaglin
Affiliation:(1) Dipartimento di Ingegneria Meccanica, Sezione Materiali, Via Marzolo 9, 35131 Padova, Italy;(2) Stazione Sperimentale del Vetro, Via Briati 10, 30121 Murano (Venezia), Italy;(3) Present address: Dipartimento di Fisica, Unità GNSM-CISM, Via Marzolo 8, 35131 Padova, Italy;(4) Dipartimento di Chimica Fisica, Calle Large S. Marta 2137, 30123 Venezia, Italy
Abstract:
Conversion electron Mössbauer spectroscopy (CEMS) has been used to investigate the various Fe coordination states at the interface of the Fe/SiO2 couple after irradiation with 200 keV Kr ions in the dose range from 2.5×1015 to 3.5×1016 ions/cm2. After removal of the unmixed Fe layer by a simple etching procedure, it was possible to recognize the presence of small Fe clusters, Fe-oxide and Fe-silicate phases, whose relative amount has been determined as a function of the irradiation dose. The amount of mixed Fe has been evaluated in the etched samples by means of Rutherford backscattering spectrometry (RBS). Structural changes in the interfacial region after thermal annealings for 5 h at 500 and 700°C have been detected and correlated to corre-sponding changes in optical properties.
Keywords:
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