| 非接触法自动测量薄膜厚度 |
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| 引用本文： | 彭真真,赵硕浛,刘月林,程匹克,陈程.非接触法自动测量薄膜厚度[J].大学物理实验,2011,24(4):33-36. |
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| 作者姓名： | 彭真真 赵硕浛 刘月林 程匹克 陈程 |
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| 作者单位： | 湖北师范学院,湖北黄石,435002 |
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| 摘 要： | 根据白光等厚干涉原理,基于单片机改造的迈氏干涉仪用于自动测量透明薄膜厚度,采用非接触性测量法。当迈克尔逊干涉仪静镜形成的虚像与动镜相交所成的夹角很小时,在光屏上看到彩色干涉条纹,插入薄膜后,光程差改变,彩纹消失。步进电机带动微调手轮转动,当彩纹再次出现,即可得出透明薄膜厚度。
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| 关 键 词： | 单片机 白光 迈克尔逊干涉仪 薄膜厚度 非接触法 |
Measurement the Thickness of a Thin Film by Automatic and Non-contact |
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| PENG Zhen-zhen,ZHAO Shuo-han,LIU Yue-lin,CHENG Pi-ke,CHEN Cheng.Measurement the Thickness of a Thin Film by Automatic and Non-contact[J].Physical Experiment of College,2011,24(4):33-36. |
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| Authors: | PENG Zhen-zhen ZHAO Shuo-han LIU Yue-lin CHENG Pi-ke CHEN Cheng |
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| Institution: | PENG Zhen-zhen,ZHAO Shuo-han,LIU Yue-lin,CHENG Pi-ke,CHEN Cheng(Hubei Normal University,Huangshi 435002) |
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| Abstract: | According to the theory of equal thickness interference of white light,we have used the Michelson interferrometer reformed based on MCU to automatically measure the thickness of a transparent thin film,which is a non-contact method.When the angle between the virtual image of the static mirror and the dynamic mirror of the Michelson interferometer is very small,the colored interference fringes will appear.After inserting a thin film,the interference fringes disappear because the optical path difference chang... |
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| Keywords: | MCU white light Michelson interferometer the thickness of a thin film non-contact method |
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