ZrO2陶瓷显微结构对绿光飞秒激光加工过程的协同效应

氧化锆(ZrO₂)陶瓷因其性能优异,常被应用于医学与工业等领域.通过表面微纳加工可进一步发挥其性能优势,扩大应用范围.实验采用绿光飞秒激光对具有不同显微结构的ZrO₂陶瓷基体进行微孔加工,结合显微结构差异对材料物理性能的影响,系统研究了激光加工功率与加工时间等工艺参数对微孔形貌、直径及深度等不同维度下形貌学特征的作用效果.结果表明,同一加工参数下,晶粒更小、显微结构更均匀、热导率更低的ZrO₂具有更高的加工效率;通过对比微孔直径与深度随激光加工工艺参数的变化,发现材料显微结构的差异对微孔轴向的影响比径向更加显著.

Synergistic Effect of Microstructure on Green Femtosecond Laser Machining Behavior of ZrO2 Ceramics

Zirconia(ZrO2)ceramics have been applied in medical and industrial fields due to their excellent properties.Surface micro-nano fabrication could bring their performance advantages into full play and also extend their application ranges,ZrO2 ceramic with different microstructures was investigated by green femtosecond laser mico-drilling.Combined with the influence of different microstructures on the physical properties of materials,the effects of laser machining parameters(viz.processing power and processing time)on the morphology,diameter and depth of the micro-holes were systematically studied.Results show that ZrO2 with smaller grain size,more uniform microstructure and lower thermal conductivity has higher processing efficiency under the same processing parameters.By comparing the change of the diameter and depth with the laser processing parameters,it is found that the difference of the material microstructure has more obvious effects along the axial direction of micro-hole relative to the radial direction.