| 旋涂法制备功能薄膜的研究进展 |
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| 引用本文： | 王东,刘红缨,贺军辉,刘林林.旋涂法制备功能薄膜的研究进展[J].影像科学与光化学,2012,30(2):91-101. |
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| 作者姓名： | 王东 刘红缨 贺军辉 刘林林 |
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| 作者单位： | 1. 中国矿业大学(北京) 化学工程与环境学院, 北京 100083;2. 中国科学院 理化技术研究所 功能纳米材料实验室, 北京 100190 |
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| 基金项目： | 中国科学院重要方向性项目，中国科学院光化学转换与功能材料重点实验室开放基金 |
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| 摘 要： | 作为众多的薄膜制备方法之一,旋涂法具备薄膜厚度精确可控、高性价比、节能、低污染等优势,在微电子技术、纳米光子学、生物学、医学等领域中有着广阔的应用前景.本文简单介绍了旋涂法的模型、机理及其主要参数的估算方法,并总结了近几年来用旋涂法制备光学、微电子学等功能薄膜的新进展,最后对旋涂法的发展前景进行了展望.
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| 关 键 词： | 旋涂法 功能薄膜 厚度控制 |
| 收稿时间： | 2011-11-07 |
Progress in Preparation of Functional Films by Spin-Coating |
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| WANG Dong
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LIU Hong-ying
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HE Jun-hui
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LIU Lin-lin.Progress in Preparation of Functional Films by Spin-Coating[J].Imaging Science and Photochemistry,2012,30(2):91-101. |
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| Authors: | WANG Dong LIU Hong-ying HE Jun-hui LIU Lin-lin |
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| Institution: | 1. School of Chemical and Environmental Engineering, China University of Mining and Technology, Beijing 100083, P.R.China;2. Functional Nanomaterials Laboratory, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, P.R.China |
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| Abstract: | Spin-coating,as one of thin film preparation methods,has advantages of precise thickness control,high cost performance,energy saving,low pollution,etc.Thin films fabricated by spin-coating are widely applied in the areas of microelectronics,nanophotonics,biology,medicine,etc.In this paper,fundamental processes and estimation methodologies of key parameters for spin-coating are briefly introduced.Then a range of advanced applications and recent progresses of spin-coating technology within several disciplines are reviewed,including optics,microelectronics,etc.Finally,the developing trend of spin-coating technology is also discussed. |
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| Keywords: | spin-coating functional films thickness control |
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