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Black Silicon nanostructures on silicon thin films prepared by reactive ion etching |
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| Authors: | Martin Steglich Thomas Kasebier Ingmar Hoger Kevin Fuchsel Andreas Tiinnermann Ernst-Bernhard Kley |
| Affiliation: | [1]Institute of Applied Physics, A bbe Center of Photonics, Friedrich Schiller University Jena Albert-Einstein-Str. 15, 07745 Jena, Germany [2]Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany |
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