Fabrication of uniform porous alumina materials by radio frequency (RF) magnetron sputtering |
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| Authors: | YueFeng Tang Jun Qi ZhengBin Gu ZhiPeng Huang AiDong Li YanFeng Chen |
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| Institution: | Department of Materials Science and Engineering, and National Laboratory of Solid State Microstructures, Nanjing University, Nanjing, Jiangsu 210093, China |
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| Abstract: | Fabrication of porous materials with uniform pore size distribution remains a challenge. In this paper, a kind of uniform porous alumina material was fabricated on a template of polystyrene microspheres by radio frequency (RF) magnetron sputtering. Surface of samples was observed by scanning electron microscopy (SEM), and the phase of porous materials was confirmed by X-ray diffraction (XRD). The pore size distribution of samples was tested by mercury intrusion method. |
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| Keywords: | Uniform pore Porous alumina materials RF magnetron sputtering Polystyrene template Mercury intrusion method |
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