Modeling of Multilayer Suspended Microstrip Line and its Discontinuities on CMOS Grade Silicon Substrate for Millimeter Wave Integrated Circuit Applications |
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| Authors: | Manish Prasad Arun S Gaur Vivek K Sharma and Nagendra P Pathak |
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| Institution: | (1) Department of Electronics & Computer Engineering, Indian Institute of Technology, Roorkee, 247667, India |
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| Abstract: | Transmission line parameters such as characteristic impedance Z0, effective dielectric constant εeff, attenuation constant α of suspended microstrip line on multilayer low resistively silicon substrate are investigated using
full wave FEM simulator HFSS. Effect of variation in the thickness of Si3N4, polyimide and metal layers on attenuation are studied. Due to suspended nature, significant reduction in transmission loss
is observed in the simulation at 60 GHz frequency. Discontinuities such as open end, gap and step in width of strip conductor
are analyzed to extract their lumped equivalent circuits which can be used in the design of integrated circuits. |
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| Keywords: | Dispersion Multilayer Suspended Microstrip Line CMOS grade Silicon Discontinuities Equivalent Circuits CMOS millimeter wave integrated circuits |
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