| 低能氩离子束对多孔铝阳极氧化膜表面的刻蚀效应研究 |
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| 引用本文： | 王森,俞国军,巩金龙,李勤涛,朱德彰,朱志远.低能氩离子束对多孔铝阳极氧化膜表面的刻蚀效应研究[J].物理学报,2006,55(3):1517-1522. |
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| 作者姓名： | 王森 俞国军 巩金龙 李勤涛 朱德彰 朱志远 |
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| 作者单位： | 中国科学院上海应用物理研究所，上海 201800 |
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| 基金项目： | 中国科学院知识创新工程项目;中国科学院资助项目;国家重点基础研究发展计划(973计划);上海市纳米科技专项基金 |
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| 摘 要： | 用低能氩离子束(Ar+)处理了多孔铝阳极氧化膜(AAO)表面.扫描电子显微镜和原 子力显微镜结果表明，Ar+束刻蚀不仅可以有效地去除AAO反面阻挡层，还可使A AO表面产生多种特殊的形貌，如采用倾角入射可使其表面产生波纹，倾角入射同时旋转样品 台，可实现表面抛光.并结合Bradley和Harper提出的无定形材料表面波纹的形成和演化理论 解释了AAO表面波纹的特征.
关键词：
多孔铝阳极氧化膜
离子束刻蚀
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| 关 键 词： | 多孔铝阳极氧化膜 离子束刻蚀 |
| 收稿时间： | 06 15 2005 12:00AM |
| 修稿时间： | 2005-06-152005-07-25 |
Etching effects of low energy argon ion beam on porous anodic aluminum oxide membranes |
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| Wang Sen,Yu Guo-Jun,Gong Jin-Long,Li Qin-Tao,Zhu De-Zhang,Zhu Zhi-Yuan.Etching effects of low energy argon ion beam on porous anodic aluminum oxide membranes[J].Acta Physica Sinica,2006,55(3):1517-1522. |
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| Authors: | Wang Sen Yu Guo-Jun Gong Jin-Long Li Qin-Tao Zhu De-Zhang Zhu Zhi-Yuan |
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| Institution: | Shanghai Institute of Applicd Physics, Chinese Academy of Sciences, Shanghai 201800, China |
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| Abstract: | Porous anodic aluminum oxide (AAO) membranes were sputtered by 500eV argon ion ( Ar+) beam. Scanning electron microscopy and atomic force microscopy i mages show that not only the barrier layer of AAO can be easily removed by Ar+ beam sputtering, but also several categories of surface morphologies w ere got by changing the incidence parameters. For instance, off-normal incidence bombardment results in ripple formation on the surface of AAO and off-normal in cidence during smple stage rotation leads to AAO surface smoothing. Theory of ri pple formation and evolution on amorphous substrate under ion beam irradiation d eveloped by Bradley and Harper is used to interpret the characteristics of rippl es on AAO surface. |
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| Keywords: | porous anodic aluminum oxide membrane ion beam etching |
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