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整体硬质合金铣刀上制备CVD金刚石涂层的系统三维流场研究
引用本文:林欢庆,卢文壮,左敦稳,徐锋,袁佳晶,马乐娟.整体硬质合金铣刀上制备CVD金刚石涂层的系统三维流场研究[J].人工晶体学报,2010,39(2):345-349.
作者姓名:林欢庆  卢文壮  左敦稳  徐锋  袁佳晶  马乐娟
作者单位:南京航空航天大学机电学院,南京,210016;中国航天科工集团公司南京八五一一研究所,南京,210016
基金项目:国家自然科学基金,江苏省自然科学基金 
摘    要:本文通过建立整体硬质合金立铣刀上制备CVD金刚石涂层时CVD沉积系统流场的三维模型,研究了进气口分布对该系统流场均匀性的影响,优化了进气口的分布;在仿真的基础上开展了整体硬质合金立铣刀上制备CVD金刚石涂层的验证实验,采用SEM和Raman对制备的CVD金刚石涂层进行了分析测试.结果表明:优化后的流场可以用于制备高质量的CVD金刚石涂层,且批量制备出的在衬底不同位置上的铣刀表面CVD金刚石涂层的质量均匀一致.

关 键 词:铣刀  CVD金刚石  涂层  三维流场  

Study on Three-dimensional Flow Field of CVD Diamond Coating Cemented Carbide Milling Cutter Preparation System
LIN Huan-qing,LU Wen-zhuang,ZUO Dun-wen,XU Feng,YUAN Jia-jing,MA Le-juan.Study on Three-dimensional Flow Field of CVD Diamond Coating Cemented Carbide Milling Cutter Preparation System[J].Journal of Synthetic Crystals,2010,39(2):345-349.
Authors:LIN Huan-qing  LU Wen-zhuang  ZUO Dun-wen  XU Feng  YUAN Jia-jing  MA Le-juan
Institution:LIN Huan-qing1,LU Wen-zhuang1,ZUO Dun-wen1,XU Feng1,YUAN Jia-jing1,MA Le-juan2(1.College of Mechanical , Electrical Engineering,Nanjing University of Aeronautics , Astronautics,Nanjing 210016,China,2.8511 Institution of Nanjing,China Aerospace Science & Industry Corp.,China)
Abstract:A three-dimensional finite element model of diamond coating on cemented carbide milling cutter in a CVD system was created and the gas flow field was simulated.It shows that proper distribution of inlets is a particularly important factor for obtaining a uniform gas flow field.On this basis,some CVD diamond coated cemented carbide end mills were prepared in this system as a verification.The coated milling cutters were analyzed by SEM and Raman.The results show that the selected distribution of inlets was ab...
Keywords:milling cutter  CVD diamond  coating  three-dimensional flow field  
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