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Large-size β-Ga2O3 single crystals and wafers |
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| Authors: | Encarnaci n G. Ví llora, Kiyoshi Shimamura, Yukio Yoshikawa, Kazuo Aoki,Noboru Ichinose |
| Affiliation: | aKagami Memorial Laboratory for Materials Science and Technology, Waseda University, 2-8-26 Nishiwaseda, Shinjuku, Tokyo 169-0051, Japan bKoha Co., Ltd., 2-6-8 Kouyama, Nerima-ku, Tokyo 176-0022, Japan |
| Abstract: | Large-size single crystals of β-Ga2O3 with 1 inc in diameter have been grown by the floating zone technique. The stable growth conditions have been determined by the examination of the crystal structure. Wafers have been cut and fine polished in the (1 0 0), (0 1 0) and (0 0 1) planes. These were highly transparent in the visible and near UV, as well as electrically conductive, indicating the potential use of β-Ga2O3 as a substrate for optoelectic devices operating in the visible/near UV and with vertical current flow. |
| Keywords: | A2. Single crystal growth B2. Semiconducting gallium compounds |
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