Fabrication of nanochannels via near-field electrospinning

A simple and low-cost method is suggested to fabricate nanochannels via Near-Field Electrospinning (NFES). In this process, orderly and patterned nanofibers direct-written by NFES are used as sacrificial templates. Well-defined nanochannels are available after the removal process of both sacrificial fibers and material coating over the fibers. The sacrificial fiber, controlled by NFES, dominates the channel geometry. The channel width ranges from 133 nm to 13.54?μm while the applied voltage increases from 1.2 kV to 2.5 kV. Complicated wave-shape and grid pattern channels are presented under a corresponding movement of substrate. This method integrates electrospinning with conventional MEMS fabrication technology and has a potential in micro/nano manufacturing.