Output irradiance uniformity in a single pass KrF amplifier

Using a model for the temporal and spatial variation of the saturation flux that considers the effects of temperature, fluorine burn-up and local E-fields on the quenching rates, it is found that long pulse operation of a KrF amplifier (τ_p > 500 ns) can result in spatial and temporal output irradiance uniformities greater than 80% across the aperture. Local E-fields are shown to be responsible for relatively large spatial saturation flux non-uniformities for short pulse KrF amplifier operation.