The annealing behavior of implanted nitrogen in fcc stainless steel

Post-implantation annealing of N-implanted 304 stainless steel at 400 °C has been investigated by conversion electron Mössbauer spectroscopy, X-ray diffraction and Auger electron spectroscopy. After a 1 h anneal, the near complete dissolution of the as-implanted Fe₂N-like nitride phase results in a 9 at.% N fcc solid-solution phase. After the final anneal (64 h), N has diffused to a depth of about 2 m and remains in solid solution with an average content of 4 at.%. An average N diffusion coefficient at 400 °C is estimated to be 10^-12-10^-14 cm²/s, depending on anneal time, too small to explain the deep penetration observed in high-flux, high-dose N-implanted stainless steel. The present results provide additional evidence for beam controlled N migration where Cr plays an important role.