Nanometer-scale objects of deposition and sputtering |
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Authors: | E V Pugina G V Kornich |
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Institution: | (1) Zaporozhye National Technical University, Zaporozhye, 69000, Ukraine |
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Abstract: | Recent theoretical and experimental works involving the study of processes of interaction of accelerated particles with solid surfaces on the nanometer-scale level are discussed. In this survey, considerable attention is given to computer simulation research. This survey contains data in the following fields: bombardment of solid surfaces by a stream of energy clusters, cluster emission during sputtering, and sputtering of nanodimensional targets. |
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