Monochromatization of radiation for spectral control of plasma technological processes

We considered the problem of and developed techniques for creating means of monochromatization of optical radiation with optimal technical-economic parameters for implementing spectral means of controlling various vacuum-plasma technological processes of applying and etching film coatings. Belarusian State University, 4, F. Skorina Ave., 220050, Minsk, Belarus. Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 65, No. 4, pp. 587–589, July–August, 1998.