Simulation of layer measurement with confocal micro‐XRF

A simple model to simulate the measurement of layered structures with confocal micro X‐ray fluorescence (micro‐XRF) was developed and implemented as a computer program. The model assumes monochromatic excitation, considers at the moment only K lines, and simplifies the volume defined by excitation and detection foci as a circle area. First simulation results and comparison with data acquired using the Atominstitut confocal micro‐XRF spectrometer are very promising. The simulation software enables us to perform parameter studies to have a better understanding of the analysis of layered structures with confocal micro‐XRF. Copyright © 2014 John Wiley & Sons, Ltd.