电感耦合等离子体质谱（ICP-MS）法测定高纯氧化铟中铜含量的不确定度评定

对电感耦合等离子体质谱法（ICP-MS）测量高纯氧化铟中铜含量的测量不确定度进行评定。不确定度的来源主要包括分析过程中所用的天平、玻璃器皿、标准曲线、标准溶液、试液定容体积、样品消解及测量重复性等引入的不确定度分量。计算出各分量的不确定度，通过合成得到测量结果的合成不确定度、扩展不确定度及测试结果的报告形式。

The Evaluation of the Uncertainty of Quantitative Determination of Copper in High Purity Indium Oxide by Inductively Coupled Plasma Mass Spectrometry

The uncertainty of quantitative determination of copper in high purity indium oxide by inductively coupled plasma mass spectrometry (ICP-MS) was evaluated. The sources causing the uncertainties mainly included using analytical balance, handling glassware, preparing calibration solution, curve fitting calibration curves, taking reagent volume, digesting samples and repeating measurement, etc. The individual uncertainty arising from each source, defined as a component of uncertainty, was calculated. The combined uncertainty together with the expanded uncertainty of measurement results were obtained by combining every calculated components of uncertainty and used in writing the final measurement report.