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Selective growth of individual multiwalled carbon nanotubes |
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| Authors: | R. E. Morjan M. S. Kabir S. W. Lee O. A. Nerushev P. Lundgren S. Bengtsson Y. W. Park E. E. B. Campbell |
| Affiliation: | a Department of Experimental Physics, School of Physics and Engineering Physics, Göteborg University and Chalmers University of Technology, SE-41296, Göteborg, Sweden;b Department of Microtechnology and Nanoscience, Chalmers University of Technology, SE-41296, Göteborg, Sweden;c School of Physics and Condensed Matter Research Institute, Seoul National University, Seoul 151-747, South Korea |
| Abstract: | Growth of individual, vertically aligned multiwalled carbon nanotubes (VACNT) on patterned Si wafers using dc plasma-enhanced CVD is described. The selective growth of individual VACNT within larger holes etched in Si is demonstrated for the first time. |
| Keywords: | Plasma-enhanced chemical vapour deposition PECVD Multiwalled carbon nanotubes Controlled individual growth |
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