Affiliation: | 1. National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China;2. Samsung Advanced Institute of Technology (SAIT), Samsung Electronics Co., Ltd., 416 Maetan-Dong, Yeongtong-Gu, Suwon, Kyungki-Do 442-742, Republic of Korea |