Co/C and W/Si multilayers deposited by ion-beam sputtering for the soft X-ray range |
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| Authors: | S.M. Feng G.L. Zhu J.D. Shao K. Yi Z.X. Fan X.M. Dou |
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| Affiliation: | (1) Physics Department of Shanghai Jiao Tong University, Shanghai, P.R. China, CN;(2) Shanghai Institute of Optics and Fine Mechanics, Science Academy of China, P.O. Box 800-211, Shanghai, P.R. China, CN |
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| Abstract: | We deposited Co/C multilayer mirrors for a wavelength of 4.77 nm and W/Si multilayer mirrors for a wavelength of 1.77 nm by use of ion-beam sputtering. The small-angle diffraction spectrum was used to analyze the structure of the multilayers. With a combination of the experimental diffraction spectra and Apeles’ theory for calculation of the interfacial roughnesses of the multilayers, the interfacial roughnesses of Co/C and W/Si are 0.80 nm and 0.60 nm, respectively, which are lower than that of the substrate. The reflectivity of the Co/C multilayer is measured to be about 20% and that of the W/Si multilayer about 1% at the grazing incidence angle of about 12°. Received: 30 May 2000 / Accepted: 1 August 2000 / Published online: 11 February 2002 |
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| Keywords: | PACS: 42.79.Bh 68.65.+g 61.10.Eq 78.66.-w 81.15.Cd |
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