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Finite element analysis of stress and strain distributions in InAs/GaAs quantum dots
Authors:Zhou Wang-Min  Wang Chong-Yu  Chen Yong-Hai and Wang Zhan-Guo
Institution:College of Mechanical & Electrical Engineering, Zhejiang University of Technology, Hangzhou 310032, China; Institute of Functional Materials, Central Iron & Steel Research Institute, Beijing 100081, China; Department of Physics, Tsinghua University, Beijing 100084, China; Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors,Chinese Academy of Sciences, Beijing 100083, China
Abstract:In this paper, we perform systematic calculations of the stress and strain distributions in InAs/GaAs truncated pyramidal quantum dots (QDs) with different wetting layer (WL) thickness, using the finite element method (FEM). The stresses and strains are concentrated at the boundaries of the WL and QDs, are reduced gradually from the boundaries to the interior, and tend to a uniform state for the positions away from the boundaries. The maximal strain energy density occurs at the vicinity of the interface between the WL and the substrate. The stresses, strains and released strain energy are reduced gradually with increasing WL thickness. The above results show that a critical WL thickness may exist, and the stress and strain distributions can make the growth of QDs a growth of strained three-dimensional island when the WL thickness is above the critical value, and FEM can be applied to investigate such nanosystems, QDs, and the relevant results are supported by the experiments.
Keywords:quantum dots  strain and stress distribution  strain energy  finite element method
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