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Features of Coating Deposition Inside a Narrow Cavity in Octafluorocyclobutane Discharge Plasma |
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| Authors: | Tolstopyatov E M Grakovich P N Ivanov L F Shelestova V A Stratanovich V A |
| Institution: | 1.Metal-Polymer Research Institute, National Academy of Sciences of Belarus, 246050, Gomel, Belarus ; |
| Abstract: | High Energy Chemistry - |
| Keywords: | |
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