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Attenuated Total Reflection Spectra of Nitrided SiO2/Si Structures |
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| Authors: | Odzhaev V. B. Pyatlitski A. N. Prosolovich V. S. Kovalchuk N. S. Soloviev Ya. A. Zhygulin D. V. Shestovsky D. V. Yankovski Yu. N. Brinkevich D. I. |
| Affiliation: | 1.Belarusian State University, Minsk, Belarus ;2.JSC INTEGRAL — INTEGRAL Holding Managing Co., Minsk, Belarus ; |
| Abstract: | Journal of Applied Spectroscopy - The behavior of nitrogen in silicon dioxide films on single-crystal silicon substrates was studied by attenuated total reflection (ATR) and time-of-flight... |
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